The comparison of AZO and AZOY films on transmission and conductivity

This paper presents two purposes: 1) the effect of the sputtering power density on AZO and AZOY films by using pulse DC magnetron sputtering technology; 2) the comparison of the differences between AZO and AZOY films optical and electrical properties under different power density. The AZO and AZOY films' resistivity decrease with the increasing of power density; both of them reach 560 μΩcm while the power density is 2.26 W/cm
²
. The transmission of AZO and AZOY films reduces as the extending of power density. Yet, AZO films become more sensitive. When power density increases from 0.42 to 2.26 W/cm
²
, transmission is significantly reduced from 88% to 74%. However, AZOY films show opposite reaction toward power density. While power density increases from 0.42 to 2.26 W/cm
²
, the transmission still keeps at 90%. Therefore, we can expect that AZOY films in this study are suitable for the application of transparent and conductive abilities.