Nonlinear distributed model for IMD prediction in BAW resonators

This work presents a distributed nonlinear equivalent circuit to asses the intermodulation distortion (IMD) occurring in a BAW resonator. Closed-form expressions for intermodulation distortion at 2f1-f2 are obtained. Comparisons between analytical and simulated results are in good agreement. Extension of this analysis could be used to predict the nonlinear performance of more complex systems using BAW resonators, such as filters. Finally, measurements are presented and explained using the proposed approach.