Development of transient type air flow meter for critical environment

In this paper, a flute type element, which is light, cheap and has high efficient contact area, is used in a laminar flow meter to expand the application fields of the meter including critical environment. At first, the representative diameter of the element is derived from the static characteristics experiments. Then, the dynamic characteristics of the flow meter are obtained using the unsteady flow generator we have developed. We confirmed that the developed flute type laminar flow meter can measure oscillatory flow up to 8Hz.