Information technique implementing system concepts for microsystems

Along with the increasing availability of new miniaturized functional elements and the success in their integration, system concepts for microsystems development are becoming an important issue. The possibilities and the wide field of applications of digital information techniques in (embedded control/signal processing), between (communications) and for (CIM-tools for development/manufacturing) microsystems are revealed. Emphasis is put on system concepts meeting typical technological shortcomings of miniaturized systems. Concepts for sensor-specific signal processing for an acceleration measurement system and a system architecture for higher reliability and cross sensitivity correction for gas multisensor microsystems are introduced as examples. Consequences concerning design strategies for complex microsystems are deduced.<
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