Conductor-backed coplanar waveguide resonators of YBa/sub 2/Cu/sub 3/O/sub 7- delta / on LaAlO/sub 3/

Conductor-backed coplanar waveguide (CBCPW) resonators operating at 10.8 GHz have been fabricated from laser-ablated and off-axis magnetron-sputtered YBa/sub 2/Cu/sub 3/O/sub 7- delta / (YBCO) high-temperature superconducting (HTS) thin films on LaAlO/sub 3/. These resonators were tested in the temperature range from 14 to 92 K. The unloaded quality factor (Q/sub 0/) at 77 K of the HTS CBCPW resonators was three to four times that of a similar gold (Au) resonator. To the author's knowledge, these results represent the first reported measurements of HTS-based CBCPW resonators.<
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