New MOEMS-switch device with electrostatic actuator

This paper presents a new concept for a 1-by-N-switch, which can be used in tree-structured optical networks. Although the switch works with any large displacement actuator, a new curved electrode electrostatic actuator for linear motion of up to 180 /spl mu/m has been designed. No tilting mechanism is needed, and the mirror surface is smooth and easily coated with highly reflecting materials. A 1-by-4-switch has been fabricated using classical low cost micromechanical technologies like surface and bulk micromachining.