A micromachined 2/spl times/2 optical switch aligned with beveled fibers for low return loss

In an optical wavelength division multiplexed (WDM) telecommunication system, optical add-drop multiplexers (OADM) with optical switches have been researched to change the paths of the signals. This paper reports on the design and characterization of a micromachined 2×2 optical switch aligned with 4 beveled fibers for low return loss in an optical add-drop application. For driving the micro mirror to change the optical paths an electrostatic comb actuator is used. The experimental return losses and polarization dependent loss were -43 and 0.05 dB, respectively.