Handling and assembly in MST - final results of a European network

The efforts to bring micro system technology (MST) closer to industrial production have been supported by the European network "handling and assembly of functionally adapted microcomponents" (HAFAM) under the EC programme "training and mobility of researchers". This paper presents some of the final results of the HAFAM network. Topics addressed in the paper are: adaptation of high precision positioning stages to the needs of handling and assembly of microparts; development of tools for handling and assembly and methods for automation; combination of different technologies in one fabrication process for batch assembly purposes; joining techniques; methods and devices for quality control and characterization of various MST structures during and after the assembly process; and finally, norms and standardisation.