Fiber attachment for waveguide based devices using V-grooves made in silicon

We developed a technique for keeping steady the optical fiber into V-grooves made by an anisotropic etching of the silicon substrate. These grooves have specific dimensions that were calculated for the center of the fiber to be at the same level (to be aligned) with an SU-8 waveguide made at the surface of the Si wafer. Simulation of the process using OPTI-FDTD has shown that the coupling efficiency between the radiations from the fiber with the waveguide is 20%.