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VHF free-free beam high-Q micromechanical resonators
Kun Wang; Ark-Chew Wong; Nguyen, C.T.-C.;
Microelectromechanical Systems, Journal of
Volume 9,
Issue 3,
Sept. 2000
Page(s):347
-
360
Abstract:
Free-free-beam flexural-mode micromechanical resonators utilizing nonintrusive supports to achieve measured Qs as high as 8400 at VHF frequencies from 30 to 90 MHz are demonstrated in a polysilicon surface micromachining technology. The microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high-Q with high stiffness in the VHF frequency range. The free-free-beam micromechanical resonators of this paper are shown to have an order of magnitude higher Q than clamped-clamped-beam versions with comparable stiffnesses
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