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Beam-steering micromirrors for large optical cross-connects
Aksyuk, V.A.; Pardo, F.; Carr, D.; Greywall, D.; Chan, H.B.; Simon, M.E.; Gasparyan, A.; Shea, H.; Lifton, V.; Bolle, C.; Arney, S.; Frahm, R.; Paczkowski, M.; Haueis, M.; Ryf, R.; Neilson, D.T.; Kim, J.; Giles, C.R.; Bishop, D.;
Lightwave Technology, Journal of
Volume 21,
Issue 3,
March 2003
Page(s):634
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642
Abstract:
This paper describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 × 256- and 1024 × 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OXC fabrics.
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