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Piezoelectric ultrasonic resonant micromotor with a volume of less than 1 mm3 for use in medical microbots

Watson, B.   Friend, J.   Yeo, L.   Sitti, M.  
Dept. of Mech. & Aerosp. Eng., Monash Univ., Clayton, VIC, Australia
This paper appears in: Robotics and Automation, 2009. ICRA '09. IEEE International Conference on
Publication Date: 12-17 May 2009
On page(s): 2225 - 2230
Location: Kobe
ISSN: 1050-4729
ISBN: 978-1-4244-2788-8
Digital Object Identifier: 10.1109/ROBOT.2009.5152400
Current Version Published: 2009-07-06

Abstract
To improve on current methods of minimally invasive surgery, research is being carried out on systems that will permit procedures to be conducted on the micro-scale using remotely operated micro-robots. One of the major stumbling blocks to meeting this need has been the absence of a practical micromotor with a volume of less than 1 mm3 with which to drive these devices. To rectify this, we present a piezoelectric ultrasonic resonant micromotor with a volume of approximately 0.75 mm3. The motor uses a novel helically cut stator that matches axial and torsional resonant frequencies, excited by a lead zirconate titanate element 0.03 mm3 in volume. An earlier motor using the same stator design, but a larger overall volume, achieved a start-up torque of 47 nNm and no load angular velocity of 830 rad/s. This performance is on the order necessary to propel a swimming microbot in small human veins.

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