Integrated hollow waveguides with arch-shaped cores
J.P. Barber
E.J. Lunt
Z.A. George
Dongliang Yin
H. Schmidt
A.R. Hawkins
Electr. & Comput. Eng. Dept., Brigham Young Univ., Provo, UT, USA
This paper appears in: Photonics Technology Letters, IEEE Publication Date: Jan. 1, 2006
Volume: 18
,
Issue: 1
On page(s):
28
- 30
ISSN: 1041-1135
Digital Object Identifier: 10.1109/LPT.2005.859990
Current Version Published: 2005-12-19
Abstract
An optical waveguide is described that has a hollow arch-shaped core. Optical confinement for this structure is based on the antiresonant reflecting optical waveguide principle. The waveguides are built on a silicon substrate using a sacrificial etch technique with reflowed photoresist serving as the sacrificial material and producing the core's arch shape. Investigations of fabrication parameters are reported that allow for predicting a final arch-shaped geometry based on initial photoresist width and thickness. Optical mode guiding is demonstrated in an arch-shaped waveguide with a liquid core.
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