<![CDATA[ Microelectromechanical Systems, Journal of - new TOC ]]>
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TOC Alert for Publication# 84 2014August 28<![CDATA[Table of contents]]>234C1C4380<![CDATA[Journal of Microelectromechanical Systems publication information]]>234C2C2126<![CDATA[A Microdischarge-Based Monolithic Pressure Sensor]]>2347617611268<![CDATA[A Polysilicon Microhemispherical Resonating Gyroscope]]>234762764906<![CDATA[Robust Pop-Up Shape Encapsulation Using Dual-Sealing]]>2 at 390 mTorr on an aluminum nitride cap encapsulating 800-μm × 800-μm size cavities. Besides a deeper cavity, the pop-up shape has smaller downward deformation of the cap layer due to its sturdy design. The increase in the robustness of TFE with pop-up radius is verified through finite element method simulations and theoretical calculation.]]>234765767773<![CDATA[A Seismic-Grade Resonant MEMS Accelerometer]]>2, dynamic range of >140 dB, and noise-limited resolution that is comparable with existing high-resolution macroscale seismometers. Experimental characterisation detailing the benchmarking of the MEMS prototype relative to an existing macroscale seismometer shows that the MEMS device tracks the passive ambient seismic response measured by a macroscale seismometer (Guralp systems CMG-3TD) over a measurement bandwidth extending from near dc (0.02 Hz) up to 100 Hz.]]>234768770728<![CDATA[Versatile Size and Shape Microlens Arrays With High Numerical Apertures]]>2347717731021<![CDATA[Microscale Characterization of a Mechanically Adaptive Polymer Nanocomposite With Cotton-Derived Cellulose Nanocrystals for Implantable BioMEMS]]>2347747842550<![CDATA[Modeling, Simulation, and Performance Evaluation of a Novel Microfluidic Impedance Cytometer for Morphology-Based Cell Discrimination]]>2347857943531<![CDATA[Mechanical Evaluation of Unobstructing Magnetic Microactuators for Implantable Ventricular Catheters]]>2347958022454<![CDATA[Uncooled Infrared Detectors Using Gallium Nitride on Silicon Micromechanical Resonators]]>2348038102221<![CDATA[No Physical Stimulus Testing and Calibration for MEMS Accelerometer]]>2348118181797<![CDATA[Surface Tension-Driven Self-Alignment of Microchips on Low-Precision Receptors]]>2348198282437<![CDATA[Delta-Sigma Control of Dielectric Charge for Contactless Capacitive MEMS]]>2348298412157<![CDATA[Impedance Based Characterization of a High-Coupled Screen Printed PZT Thick Film Unimorph Energy Harvester]]>2 Q ≃ 7, the harvester exhibits two optimum load points. The peak power performance of the harvester was measured to 11.7 nW at an acceleration of 10 mg with a load of 9 kQ at 496.3 Hz corresponding to 117 μW/g^{2}.]]>2348428543749<![CDATA[High Voltage Output MEMS Vibration Energy Harvester in <inline-formula> <tex-math notation="TeX">$d_{31}$ </tex-math></inline-formula> Mode With PZT Thin Film]]>31 mode is usually <;1 V at present. In practical applications, rectifier circuit is often utilized after vibration energy harvester. So the low voltage output will cause most of the power loss in rectifier circuit. To solve this problem while ensuring high power output, a d_{31} mode PZT thin film MEMS vibration energy harvester with high voltage output is designed and fabricated. The proposed harvester consists of five cantilevers and one silicon proof mass. The dimensions of each cantilever are 3 mm x 2.4 mm x 0.052 mm and the proof mass dimensions are 8 mm x 12.4 mm x 0.5 mm. Al/PZT/LaNiO3/Pt/Ti/SiO_{2} multilayered films are deposited on a SoI wafer and then the cantilevers are patterned and released. The single cantilever of the harvester produces 21.36-μW average power and 8.58-mW cm^{-3} g^{-2} power density at 0.5-g acceleration and 228.1-Hz frequency. When the cantilevers are connected in series, the harvester produces 3.94 V rms open circuit voltage with 59.62 μW power for 0.5-g acceleration and 5.72 V rms open circuit voltage with 157.9 μW power for 1-g acceleration at their resonance frequency.]]>2348558614011<![CDATA[A Systematical Method to Determine the Internal Pressure and Hermeticity of MEMS Packages]]>2348628703778<![CDATA[Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers]]>2348718874805<![CDATA[A 3-D Stacked High-<inline-formula> <tex-math notation="TeX">$Q$ </tex-math></inline-formula> PI-Based MEMS Inductor for Wireless Power Transmission System in Bio-Implanted Applications]]>2348888982804<![CDATA[Fabrication and Characterization of a Novel Nanoscale Thermal Anemometry Probe]]>2348999071851<![CDATA[Thermal Flow-Sensor Drift Reduction by Thermopile Voltage Cancellation via Power Feedback Control]]>2349089171471<![CDATA[Tailoring Anchor Etching Profiles During MEMS Release Using Microfluidic Sheathed Flow]]>2349189262034<![CDATA[Deflection and Pull-In of a Misaligned Comb Drive Finger in an Electrostatic Field]]>2349279331400<![CDATA[A Monolithic Polyimide Micro Cryogenic Cooler: Design, Fabrication, and Test]]>2349349431830<![CDATA[Characterization of Interlayer Sliding Deformation for Individual Multiwalled Carbon Nanotubes Using Electrostatically Actuated Nanotensile Testing Device]]>2349449546171<![CDATA[Modeling Electrochemical Etching of Proton Irradiated p-GaAs for the Design of MEMS Building Blocks]]>2349559603486<![CDATA[Design and Characterization of Micro Thermoelectric Cross-Plane Generators With Electroplated <inline-formula> <tex-math notation="TeX">${rm Bi}_{2}{rm Te}_{3}$ </tex-math></inline-formula>, <inline-formula> <tex-math notation="TeX">${rm Sb}_{x}{rm Te}_{y}$ </tex-math></inline-formula>, and Reflow Soldering]]>2Te_{3}, Cu, and p-type Sb_{x}Te_{y} are integrated into the generator. The deposition of antimony telluride is performed to the largest thickness reported to date. The influence of thermal annealing on the material properties is studied. A new flip-chip reflow soldering process with Bi_{57}Sn_{42}Ag_{1} soldering paste is presented that allows for enhanced thermal coupling of the generators. The manufactured generators are electrically and thermally fully characterized. They generate up to 1.63 μW cm^{-2} K^{-2}, which corresponds to a maximum power density of 2434.4 μW cm^{-2}.]]>2349619711501<![CDATA[Measuring Effective Flexure Width by Measuring Comb Drive Capacitance]]>2349729793802<![CDATA[iGC1: An Integrated Fluidic System for Gas Chromatography Including Knudsen Pump, Preconcentrator, Column, and Detector Microfabricated by a Three-Mask Process]]>3 system. The stacked iGC1 system demonstrates the successful separation and detection of an alkane mixture in the range of C_{5}-C_{8} in less than 60 s.]]>2349809904107<![CDATA[Hypodermic-Needle-Like Hollow Polymer Microneedle Array: Fabrication and Characterization]]>2349919982069<![CDATA[Dynamic Properties of Angular Vertical Comb-Drive Scanning Micromirrors With Electrothermally Controlled Variable Offset]]>23499910084863<![CDATA[2014 EDS Education Award Call for nominations]]>234C3C3449