Influence of de-bubbling on crystal structure and magnetic properties of electrodeposited CoNiP layers

Hard magnetic layers have been motivated in the development of microelectromechanical systems (MEMS) components such as micro-actuators, field generators, and micro-motors. Electrodeposition (ED) has been an efficient and cost-effective way to fabricate these magnetic components due to its fast deposition rate and compatibility with lithographic patterns. Electrodeposited CoNiP layers exhibit high coercivity and magnetic energy density which are suitable for use in MEMS. Nevertheless, hydrogen bubbles are unavoidable during ED giving rise to detrimental surface morphology, microstructure and film adhesion to substrate. Therefore, how to eliminate H
₂
bubbles is vital during ED. In this paper, we report the manifest effects of stirring methods on crystal structure and magnetic properties of ED CoNiP layers.