Accurate modeling of capacitive micromachined ultrasonic transducers in pulse-echo operation

We present a large-signal model of capacitive micromachined ultrasonic transducers (CMUTs). This model combined with transmit-receive electronics is implemented in an electrical circuit simulator. We investigate optimum biasing scheme to increase output pressure and the amount of nonlinearity generated in transmit. Comparison to experiments shows that the model can be used to estimate the performance of CMUTs in pulse-echo operation.