Fabrication of bottom-up gas sensors based on individual SnO2 nanowires and suspended microhotplates

Bottom-up devices were obtained using individual SnO
2
nanowires contacted to platinum microelectrodes integrated in suspended microhotplates with the help of FIB nanolithography techniques. These devices were electrically characterised showing high stability and reproducibility characteristics. Gas detection experiments were performed, demonstrating that gas sensors with improved properties can be obtained by means of this fabrication methodology.