Abstract:
A multi-step electromechanical /spl Sigma//spl Delta/ modulator for /spl mu/g accelerometers is described. A two-element sensor array is used in two /spl Sigma//spl Delta...Show MoreMetadata
Abstract:
A multi-step electromechanical /spl Sigma//spl Delta/ modulator for /spl mu/g accelerometers is described. A two-element sensor array is used in two /spl Sigma//spl Delta/ loops and resolution improves by >2x compared to a conventional 2nd-order /spl Sigma//spl Delta/ modulator. This CMOS chip operates at 1 MHz and provides 0.2-1.2V/pF sensitivity, <20aF resolution, >120dB dynamic range, and dissipates <12mW.
Published in: 2003 IEEE International Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC.
Date of Conference: 13-13 February 2003
Date Added to IEEE Xplore: 26 February 2004
Print ISBN:0-7803-7707-9
Print ISSN: 0193-6530
Contents 