Temperature characteristics of single-crystal silicon electret microphones

Silicon Electret Condenser Microphones (Si-ECMs) are being studied to achieve small size, high performance, and reliability using Micro Electro Mechanical System (MEMS) technology. Increased robustness and stability are important to ensure wider use. In particular, temperature characteristics for microphones must be evaluated. Here, we focus on the diaphragm and impedance converter, which are the main factors determining the temperature characteristics of microphones, and present a method for measuring temperature characteristics and evaluating results for each parameter. The experimental Si-ECMs were found to have good temperature characteristics compared to a conventional ECM. These results indicate that the Si-ECM has the potential to be applied for measurement.