A new type of MEMS accelerometer with up-tuning structure

In this paper, design, implementation and characterization of a new type of Micro-electromechanical system (MEMS) accelerometer with up-tuning structure is presented. Under some circumstances, the spring of the beam is very fragile and can be easily broken which is unrepairable due to a relatively large acceleration. Up-tuning effect can greatly solve the problem and harden the spring of the beam. Firstly, the theoretical design and working principle of tuning structure are presented. Then, fabrication process and parameters is illustrated. Finally, experiments are conducted. The resonant frequency can be tuned from 386Hz to 407Hz when the tuning voltage changes from 0V to 12V. The equivalent spring constant can be tuned from 65N/m to 72N/m. The linearity of the new type of MEMS accelerometer with up-tuning structure can reach 99.9865%.