An improved dual-mass decoupled micro-gyroscope for the non-ideal decoupled error suppression

The structure design of an improved dual-mass decoupled micro-gyroscope(DDMG) was presented in the paper. The non-ideal decoupled error was suppressed by the improved drive decoupled beam. The improved drive decoupled beam reduced the drive decoupled torque by decreasing the moment arm, which was beneficial to suppress the rotational displacement error of sense frame in drive mode. At the same time, the quadrature error correction electrode was adopted to suppress the quadrature error further in the DDMG. The mode distribution of the micro-gyroscope was optimized by Ansys simulation. The simulation results indicated that the improved drive decoupled beam has suppressed effectively the rotation movement of sense frame resulting from the non-ideal decoupling error. The DDSOG process was adopted for the fabrication of the micro-gyroscope structure. The mechanical coupling error of the improved DDMG was measured to assess the non-ideal decoupled characteristics. The experiment results demonstrated that, comparing to the first generation DDMG, the quadrature error in the improved DDMG was decreased by 9.66 times and the offset error was decreased by 6.36 times, which indicated that the non-ideal decoupled error was suppressed significantly in the optimization DDMG.