Study of de-golding technology for MIM capacitor failure analysis in GaAs integrated circuit

In older to show the failure phenomena of breakdown spot caused by a small energy voltage for metal-insulator-metal (MIM) capacitors failure analysis in GaAs integrated circuit, different methods of de-golding technology was discussed in this paper. A kind of de-golding solution was optimization with consideration of MIM capacitors' construction and material. Typical MIM capacitor failure analysis cases that used the solution were introduced. The method of de-golding technology also can be applied to other metal-insulator-semiconductor (MIS) capacitors or MIM/MIS structures for failure analysis.