Irradiating low-temperature atmospheric pressure plasma to cells using MEMS nozzle

A MEMS nozzle device achieved low-temperature atmospheric pressure plasma irradiation for individual treatment of cells. The MEMS nozzle device had cell-trapping and releasing function, which enabled stable plasma treatment. Cells were trapped at the nozzle holes and the nozzle holes defined the area of plasma irradiation. Plasma treatment was performed against polyethylene bead (φ30 μm), lily pollen (length: 100-140 μm) and narcissus pollen (length: 20-60 μm). Surface area of φ10-20 μm was locally etched. By improving the configuration of plasma generation, nozzle temperature during the plasma irradiation was decreased to 40 °C, which was almost the same as human body.