High spatial resolution on-chip active magnetic field probe for IC chip-level near field measurements

An on chip active magnetic field probe has been developed for IC chip-level magnetic near field measurements. A low noise amplifier (LNA) and a loop coil were implemented in 0.18 μm Si-CMOS technology, and solder-bonded to PCB to complete the probe. Its gain is 13.3 dB at 2 GHz. The probe is applied for magnetic near field evaluation of a test element group (TEG) chip that emulates Long Term Evolution (LTE)-class radio frequency integrated circuit (RFIC) receiver. It is demonstrated to detect on-chip in-band interference sources.