Application of surface acoustic wave devices for acceleration sensing

The fundamentals of the theory of surface acoustic waves (SAW) and the principles of construction of frequency differential converters on SAW are presented. SAW-based microaccelerometer design concept is discussed. Calculation of the microaccelerometer console optimal form for reducing the technological errors effect is completed. The technology of quartz packaging, the possibility of laser frequency adjustment and simultaneous formation of the resonator structures on the opposite sides of the console with the use of a laser are considered.