Measurement of spatial response of CMOS antenna-coupled FET detector at 325GHz

A FET detector, fabricated in a standard CMOS technology and coupled to a bow-tie antenna is characterized in terms of spatial response by using a deconvolution method. An optical setup is used to produce a predictable impulse response. The resulting spatial response shows interaction with other structures present on the chip, while the measured shape is in agreement with the antenna effective area calculations.