Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process

Two series of devices, bonding quality testing devices and torsional strength testing devices, were designed to fully investigate the mechanical strength of the micro anchor-beam combined structure, which is fabricated by silicon-on-glass process. It's proved that the bonding quality of the anchor degenerates severely when the anchor size becomes very small. And the results of anodic bonding quality testing device demonstrated that array-shaped anchor design helped to improve the anodic bonding yield. According to the bending fracture test of the torsional strength testing devices, the array-shaped anchor design has an almost equal, even bigger torsional strength compared with single anchor.