Laser plasma sources of soft X-rays and extreme ultraviolet (EUV) for application in science and technology

Summary form only given: Application of laser plasma sources of soft X-rays and extreme ultraviolet (EUV) developed in our laboratory in various areas of plasma physics, nanotechnology and biomedical engineering are presented. The sources are based on interaction of high-intensity nanosecond laser pulses from commercial Nd:YAG lasers with gas puff targets formed by pulsed injection of gas under high-pressure. The use of a gas puff target instead of a solid target makes possible to generate plasmas emitting soft X-ray and EUV radiation without target debris production.