Technique of non-linear surface form error on-line measurement

Most of the current methods of accurate surface form error measurement is only suitable for linear and regular surface, there is no available accurate method for non-linear surface. This paper fund an online surface form error measurement system based on Time domain least-square serial two-point method which been upgrade by self-adaptable error separation matrix technique for uplift its ability to measure non-linear surface. The self-adaptable error separation matrix technique is allowed adjustment being placed automatically to the error separation matrix for non-linear surface error separation without compromise the accuracy of the system. The comparison of the result from the simulation which was being run on a non-linear surface of 10*9 grids clearly shows that the error's offset of the method in this paper is not larger than the random measurement error. Experimental results show that this method can work on the measurement of non-continuous, irregular surface without accuracy reduction.