Advances in silicon carbide micro- and nano-electro-mechanical systems fabrication technology and applications

This paper provides a background on the features and benefits of silicon carbide (SiC) semiconductor platform for microsystems applications. It then focuses on our work at Case Western Reserve University to develop and disseminate this platform technology in order to harvest its benefits for advancing instrumentation and control in operating environments that are beyond the reach of the material capabilities of silicon. We focus on highlights from our interests and pursuits in the last five years.