Digitally programmable resonator by PZT-SOI process

This work presents a PZT-MEMS oscillator array with more than 30 resonance modes that could be selectively excited by choosing an appropriate set of drive and pick-up electrodes distributed on the array network. PZT films of large piezoelectric constant have been developed on a SOI (Silicon-on-Insulator) wafer by using the ADRIP (Arc Discharged Reactive Ion-Plating).