A 2.5V 14-bit /spl Sigma//spl Delta/ CMOS-SOI capacitive accelerometer

This paper presents a 2.5V 14b fully-differential /spl Sigma//spl Delta/ interface IC in 0.25/spl mu/m CMOS based on a programmable front-backend architecture for a high-resolution SOI capacitive accelerometer. Capacitive resolution is 22aF at 75Hz (RBW = 1 Hz), equivalent to 110/spl mu/g with a dynamic range of 85dB and sensitivity of 0.5V/g. The chip occupies 2mm/sup 2/ and consumes 6mW.