Development of new antimony and indium dopants for ion implantation

Three antimony and indium compounds, CH
₃
SbBr
₂
, (SbCl
₃
)·[SbCl
₃
·S(CH
₃
)
₂
] and (hfac)In(CH
₃
)
₂
were synthesized and characterized by spectroscopic methods. These compounds are highly volatile with excellent thermal stability. CH
₃
SbBr
₂
contains only one carbon that may minimize carbon incorporation. (SbCl
₃
)·[SbCl
₃
·S(CH
₃
)
₂
] is a new volatile dimeric compound. (hfac)In(CH
₃
)
₂
is an air and moisture stable compound and is readily sublimed at room temperature. These compounds show promise for use as ion implant dopants.