A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of /spl plusmn/1.4/spl deg/ at 66 V/sub DC/ was achieved for a 1-mm-diameter micromirror.