Fabrication of NdFeB thick film magnets by high speed PLD method

In this paper, the targets with the compositions of Nd/sub x/Fe/sub 14/B (X=2.0-4.0) were prepared. Then, they were ablated with a pulse laser at the repetition rate of 30 Hz, and films were deposited on Ta substrates. The coercivity and remanence of the films were almost independent of the film thickness at approximately 1000 kA/m and 0.55 T within the thickness range of 10-80 /spl mu/m. Also the maximum energy product value of 77 kJ/m/sup 3/ as the best magnetic property was obtained by using the high speed PLD method.