Angular vertical comb-driven tunable capacitor with high-tuning capabilities
Nguyen, H.D.; Dooyoung Hah; Patterson, P.R.; Rumin Chao; Piyawattanametha, W.; Lau, E.K.; Wu, M.C.
Microelectromechanical Systems, Journal of
Volume 13, Issue 3, June 2004 Page(s): 406 - 413
Digital Object Identifier   10.1109/JMEMS.2004.828741
Summary: This paper reports on a novel tunable capacitor with electrostatic angular vertical comb-drive (AVC) actuators. The AVC tunable capacitor creates a large offset in comb fingers through a small rotation angle-an advantage not found in conventional lateral comb-drive devices. High capacitance and large continuous tuning ratio is achieved in a compact device area. The largest tuning varactor demonstrates capacitance values between 0.27-8.6 pF-a tuning ratio of more than 31:1, the highest ever reported. The maximum quality factor Q is 273 at 1 GHz near the minimum capacitance value.

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