A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers

A MEMS micromirror array with hidden vertical comb-drive actuator and springs has been successfully demonstrated. The devices were fabricated using SUMMiT-V process. The fabricated micromirror showed large optical scan angle (24/spl deg/) and low actuation voltage (9 V). The fill-factor of the micromirror array was as high as 91%. Applications of the micromirror array for WDM routers are also discussed.