Spatial Resolution Assessment of Nano-SQUIDs Made by Focused Ion Beam

The ability to reduce SQUID dimensions into the sub-micrometer or nanometer regime points the way towards novel applications, particularly in emerging fields such as quantum information processing, single-photon/particle detection, and experimental studies of nano-scale entities such as Bose-Einstein condensates. We report here on our ongoing work combining traditional thin-film and photolithographic fabrication processes with computer-aided-design software and focused ion beam milling to realize sub-micrometer superconducting structures. Their magnetic field sensitivity, noise behavior, spatial resolution, and prospects for magnetic spin detection are discussed.