Multi-frequency resonator array using laser beam twinning technique

We have already proposed monolithic integration of resonators on an artificial twin AT-cut quartz plate. In the configuration, resonators on an AT-cut plate are elastically isolated by a line shaped x-axis inversion area prepared by an artificial twinning technique. This paper presents a new twinning technique using a laser beam and its application to fabricate a resonator array on an AT-cut plate. For example, a resonator array composed of six (2/spl times/3) resonators was fabricated on an artificial twin AT-cut quartz plate (plate size: 16/spl times/15 mm). The width of the twinning area was several times of plate thickness. It was confirmed that the resonators were almost completely isolated by the x-axis inversion area.