Micro-actuator for HDD tracking servo

A micm-actuator which can dramatically increase the record density of a harddisk drive WD) is presented"). This mim-actuator is located between suspension and slider (Fig. l), allowing the slider (and the magnetic head) to move with very high kquency and accuracy. This enables a fmer data track pitch. resulting m a higher areal recording density. The target of our project is more than IO GbiVinch2 recording density by more than 25 kilo track-per-inch(TP1) hack pitch, which requires higher than 2KHz tracking servo bandwidth.