Electron field emission from diamond-like carbon film under pulsed DC supply

In this paper, a hydrogen-free high sp/sup 3/ content (>90%) diamond-like carbon (DLC) film was prepared by filtered arc deposition (FAD). Its electron field emission behavior and fluorescent displays are tested using a simple diode structure. Emission current is 5.4 /spl mu/A at electric field as low as 5 V//spl mu/m, and emission current density of about 5 mA/cm/sup 2/ can be obtained at electric fields as low as 20 V//spl mu/m. Field emission current is stable. A uniform fluorescence display of electron emission from the DLC film under an electric field of 12 V//spl mu/m was also obtained. It is thought that the fine electron emission property results from the smooth surface and high sp/sup 3/ content of the DLC. A DLC column micro-emitter array was also fabricated by reactive-ion etching (RIE).