Diagnostics and modeling in the development of the VIISta 810 ion implanter

At different stages in the development of the VIISta 810, Varian's new 200/300 mm medium current implanter, extensive experimental measurements were taken for a wide range of beams. These measurements included beam currents, beam profiles as well as vertical and horizontal emittances. In this paper, we discuss these results and their relevance in improving the beam line design. The experimental data collected at each phase of the machine development was used as input for the computer modeling of the successive stage of the beam line. Computer simulations were used as an integral and essential part of the development. Numerical simulations and experimental results are presented.