The core ion implanter for 300-mm wafers: IW-630

The IW-630 is the core machine of ULVAC's new generation ion implantation system for 300-mm wafers, which system is capable of flexible use in factory designs. The basic concept of the system and the key technologies that were indispensable to realizing the design concept-such as the beam scanner, in-line dose monitor and evacuation system-are described in other documents. In this paper, the basic design and the performance experimentally confirmed of the prototype of IW-680 are discussed.