Computational fluid dynamics modeling of flexural plate wave pumps

This paper presents design issues and a numerical model of a micromachined pump based on acoustic streaming in water. Influences of channel height, wave amplitude, and backpressure on the velocity profile and flow rate are investigated. Using these results, design rules for the acoustic micropump are derived. Thermal transport effects of the acoustic streaming are also discussed in order to integrate a thermal flow sensor into the pump or to apply the pump for cooling purposes.