The Impact of Intrinsic Series Resistance on MOSFET Scaling

There have been a few papers published, of which Ref. [1] is an example, addressing the effects of intrinsic series resistance on the scaling of MOSFET's. The intention is to use predicted technologies and the scaled device structures to first calculate the series resistance, and then examine the detrimental effects due to this resistance, as physical dimensions continue to be miniaturized.