SIMPL-2 (SIMulated Profiles from the Layout-Version 2)

SIMPL is a computer-aided design(CAD) tool for simulating the cross sectional profile of integrated circuits along an arbitrary 'cut-line' drawn on the layout. The second generation of SIMPL, SIMPL-2 is capable of displaying in color two dimensional process effects such as the 'bird's-beak', lateral diffusion, undercut in etching and sidewall coverage in deposition. The device profile from the composite process can be generated rapidly using elementary internal physical process models. More rigorous external process simulators can also be invoked through an interface for profile data and transfer of control. SIMPL-2 can thus act not only as a color display tool for other simulators but can also provide a here-to-fore missing link between layout based CAD tools and process and device simulators.