Efficiency AMHS for twin FAB manufacture

This paper addresses the challenges facing PSC in the automation transport of twin FAB (FAB12AB). According to FAB output strategy, we have to consider the bottleneck of transportation and equipments/AMHS layout constraints. Further improved the INTER-FAB transportation capability. In our original INTER-FAB design capacity is 4400 move/day. After improved, we gained the extra 4600 move/day. It means we have improved the INTER-FAB transportation capability by 105%. In addition, the INTER-FAB transport time decreases from 18 min/move to 13 min/move.