A miniaturized Orbitron pump for MEMS applications

The principle of the Orbitron pump is described. Its miniaturization is simulated. Field emitters operating in mbar vacuum levels, with short emitter-extractor distance and an incorporated ion mirror are advantageous compared to heated electron emitters. This miniaturized electron gun requires 16 nA of current but can be supplied with up to 400 /spl mu/A of ionizing current. Employing micromechanical technologies, the Orbitron pump can be built and integrated into a MEMS device to supply UHV in a volume of <1 Mio /spl mu/m/sup 3/ on a chip. Connecting the pump with a load vacuum volume, miniature UHV requiring devices can be pumped down on chip and operated by only electrical controls.