Above IC MEMS capacitors for integrated reconfigurable circuits

This paper presents the design and the technology of MEMS capacitors for reconfigurable circuits for wireless application. A MEMS capacitors library has been built and permits an efficient design of switched microwave networks. To assure an "above IC" integration of these components, a MEMS technological process has been defined and integrates several features. The process is indeed BCB-based, which assures a high level of performances up to millimeter wave frequencies. The technology also integrates resistors, which are indispensable for the considered devices. Simulations and measurements are in good agreement, which validates the followed approach and excellent RF performances have been obtained. These defined library, design methodology and associated technology then permit to carry out efficient definition of smart circuits and systems, with high level of integration, high RF-performances and the ability to be reconfigurable.