An ultra-compact low loss 30-GHz micromachined coaxial filter

In this paper, we present a novel low-loss (1.5 dB) 3rd order Chebyshev filter with a center frequency of 29.5 GHz and a 3 dB bandwidth of 1.4 GHz. The filter fits within a compact 5.1 mm /spl times/ 3.3 mm footprint. The filter was designed with a fully shielded integrated coax structure and fabricated using EFAB/spl trade/ technology, a selective electrochemical metal deposition process. We have demonstrated minimal performance effects from two 180 degree bends in the filter structure.